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Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales Jianfeng Luo Softcover reprint of hardcover 1st ed. 2004 edition
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales
Jianfeng Luo
Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example.
335 pages, biography
| Media | Boeken Paperback Book (Boek met zachte kaft en gelijmde rug) |
| Vrijgegeven | 15 december 2010 |
| ISBN13 | 9783642061158 |
| Uitgevers | Springer-Verlag Berlin and Heidelberg Gm |
| Pagina's | 311 |
| Afmetingen | 155 × 235 × 17 mm · 471 g |
| Taal en grammatica | Duits |
Bekijk alles van Jianfeng Luo ( bijv. Hardcover Book en Paperback Book )
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