Vertel uw vrienden over dit artikel:
Lithography Process Control - Tutorial Texts Harry J. Levinson
Lithography Process Control - Tutorial Texts
Harry J. Levinson
This text is intended to be a self-contained tutorial on lithography process control. It works as an introduction to those entering the field, and as a reference for the experienced lithography engineer. Topics covered include linewidth control, overlay, and yield.
194 pages, Illustrations, 1 port.
| Media | Boeken Paperback Book (Boek met zachte kaft en gelijmde rug) |
| Vrijgegeven | 1 februari 1999 |
| ISBN13 | 9780819430526 |
| Uitgevers | SPIE Press |
| Pagina's | 194 |
| Afmetingen | 150 × 220 × 10 mm · 444 g |
Mere med samme udgiver
Bekijk alles van Harry J. Levinson ( bijv. Paperback Book , Hardcover Book en Book )