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![Cover for Wayne M. Moreau · Semiconductor Lithography: Principles, Practices, and Materials - Microdevices (Paperback Book) [Softcover reprint of the original 1st ed. 1988 edition] (2012)](https://imusic.b-cdn.net/images/item/original/280/9781461282280.jpg?wayne-m-moreau-2012-semiconductor-lithography-principles-practices-and-materials-microdevices-paperback-book&class=scaled&v=1522532785)